P

Inventor

SUZUKI KOUSUKE

JP67 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI KOUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

11 patents
US5581324ADec 3, 1996

Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors

NIKON CORP206 citations98
US7230682B2Jun 12, 2007

Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium

NIKON CORP49 citations96
US6235438B1May 22, 2001

Projection exposure method and apparatus

NIKON CORP96 citations95
US6416913B1Jul 9, 2002

Scanning exposure method accounting for thermal transformation of mask

NIKON CORP20 citations93
US6456377B1Sep 24, 2002

Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature

NIKON CORP30 citations92
US6522390B2Feb 18, 2003

Projection exposure method and apparatus

NIKON CORP43 citations90
US7405803B2Jul 29, 2008

Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium

NIKON CORP10 citations84
US5917581AJun 29, 1999

Projection exposure method and apparatus therefor

NIKON CORP12 citations74
US7123347B2Oct 17, 2006

Image formation characteristics adjustment method for projection optical system

NIKON CORP6 citations63
US6825932B2Nov 30, 2004

Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature

NIKON CORP3 citations62
US7391497B2Jun 24, 2008

Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium

NIKON CORP0 citations52

RICOH KK

9 patents

SONY CORP

8 patents

SONY GROUP CORP

6 patents

FUJITSU LTD

3 patents

TOYOTA MOTOR CO LTD

2 patents

NHK SPRING CO LTD

2 patents

AEROSENSE INC

2 patents

NAGAYAMA MASASHI

2 patents

SUZUKI KOUSUKE

1 patent

KISHIDA HIROYUKI

1 patent

SUZUKI NAMIE

1 patent

UEHARA YUSAKU

1 patent

SUMIDEN TRANS AND DISTRIBUTION SYSTEM PRODUCTS LTD

1 patent

Showing the top 50 of 67 patents by PatentIndex Score.