Inventor

AHN HYUNG SUK

KR2 patents

Patents

2 patents

US7473661B2Jan 6, 2009

Method for preparing a sintered body of aluminum nitride

KOMICO LTD7 citations70

US7375045B2May 20, 2008

High dense sintered body of aluminum nitride, method for preparing the same and member for manufacturing semiconductor using the sintered body

KOMICO LTD3 citations59