Inventor
BAUMLER JUERGEN
DE3 patents
Patents
3 patentsUS6768765B1Jul 27, 2004
High power excimer or molecular fluorine laser system
LAMBDA PHYSIK AG18 citations81
US7079565B2Jul 18, 2006
Systems and methods utilizing laser discharge electrodes with ceramic spoilers
LAMBDA PHYSIK AG8 citations71
US6847671B1Jan 25, 2005
Blower for gas laser
LAMBDA PHYSIK AG6 citations57