Inventor
KWEAN SUNG-UN
KR6 patents
Patents
6 patentsUS6656808B2Dec 2, 2003
Transistor having variable width gate electrode and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD17 citations80
US6150281ANov 21, 2000
Method for manufacturing contact hole using an etching barrier layer pattern
SAMSUNG ELECTRONICS CO LTD18 citations80
US6897153B2May 24, 2005
Etching gas composition for silicon oxide and method of etching silicon oxide using the same
SAMSUNG ELECTRONICS CO LTD6 citations61
US6825121B2Nov 30, 2004
Method of manufacturing a capacitor of a semiconductor device
SAMSUNG ELECTRONICS CO LTD5 citations61
US6815335B2Nov 9, 2004
Method for forming a contact in a semiconductor process
SAMSUNG ELECTRONICS CO LTD2 citations61
US7001692B2Feb 21, 2006
Method of forming a mask having nitride film
SAMSUNG ELECTRONICS CO LTD1 citations50