Inventor
JANG YUN KYEONG
KR3 patents
Patents
3 patentsUS10553438B2Feb 4, 2020
Semiconductor device and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US7932019B2Apr 26, 2011
Gettering members, methods of forming the same, and methods of performing immersion lithography using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US10168627B2Jan 1, 2019
Exposure apparatus and method for cleaning the same
SAMSUNG ELECTRONICS CO LTD0 citations42