Inventor

BABCOCK CARL P

US22 patents

⚠️ This page may combine multiple inventors who share the name “BABCOCK CARL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BABCOCK CARL P

ADVANCED MICRO DEVICES INC

Simplified method of patterning field dielectric regions in a semiconductor device

Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results

System and method for automatic generation of optical proximity correction (OPC) rule sets

System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques

Method for using phase-shifting mask

System and method for developing a photoresist layer with reduced pattern collapse

Reducing feature dimension using self-assembled monolayer

Method to improve accuracy of model-based optical proximity correction

Binary and attenuating phase-shifting masks for multiple wavelengths

System for and method of using bacteria to aid in contact hole printing

Optical proximity correction (OPC) technique to compensate for flare

Immersion lithographic process using a conforming immersion medium

System for determining overlay error

Method of forming shallow trench isolation using antireflection layer

Growth of photoresist layer in photolithographic process

Ultra narrow lines for field effect transistors

Shallow trench isolation using antireflection layer

Pellicle for a lithographic lens

Method of making ultra small vias for integrated circuits

Shallow trench isolation using antireflection layer

Shallow trench isolation using antireflection layer

GLOBALFOUNDRIES INC

System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques