Inventor
KIM SungHyup
KR18 patents
Patents
18 patentsUS11607741B2Mar 21, 2023
Semiconductor chip bonding apparatus including head having thermally conductive materials
SAMSUNG ELECTRONICS CO LTD7 citations80
US11599031B2Mar 7, 2023
Target debris collection device and extreme ultraviolet light source apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations72
US11231656B2Jan 25, 2022
Target debris collection device and extreme ultraviolet light source apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US11538697B2Dec 27, 2022
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD2 citations71
US10672629B2Jun 2, 2020
Ring assembly and chuck assembly having the same
SAMSUNG ELECTRONICS CO LTD5 citations67
US11852984B2Dec 26, 2023
Target debris collection device and extreme ultraviolet light source apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11454882B2Sep 27, 2022
Pellicle for reflective mask
SAMSUNG ELECTRONICS CO LTD0 citations62
US11711883B2Jul 25, 2023
Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11837573B2Dec 5, 2023
Chip bonding apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD1 citations59
US11848301B2Dec 19, 2023
Method of manufacturing a semiconductor package
SAMSUNG ELECTRONICS CO LTD0 citations58
US11626381B2Apr 11, 2023
Bonding head including a thermal compensator, die bonding apparatus including the same and method of manufacturing semiconductor package using the same
SAMSUNG ELECTRONICS CO LTD0 citations58
US11698590B2Jul 11, 2023
Collector mirror and apparatus for creating extreme ultraviolet light including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12170233B2Dec 17, 2024
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method
SAMSUNG ELECTRONICS CO LTD0 citations56
US11304287B1Apr 12, 2022
Extreme ultraviolet light source systems
SAMSUNG ELECTRONICS CO LTD0 citations56
US11415891B2Aug 16, 2022
Extreme ultraviolet light source system
SAMSUNG ELECTRONICS CO LTD0 citations54
US10411062B2Sep 10, 2019
Substrate bonding apparatus having adsorption sectors with different vacuum pressures and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US12298676B2May 13, 2025
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations44
US11720027B2Aug 8, 2023
Apparatus for generating extreme ultraviolet light and lithography apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations43