Inventor
ZIMMERMAN NOLAN
US6 patents
⚠️ This page may combine multiple inventors who share the name “ZIMMERMAN NOLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
5 patentsUS7390383B2Jun 24, 2008
Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces
SEMITOOL INC17 citations92
US7393439B2Jul 1, 2008
Integrated microfeature workpiece processing tools with registration systems for paddle reactors
SEMITOOL INC11 citations83
US7390382B2Jun 24, 2008
Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods
SEMITOOL INC13 citations83
US7294243B2Nov 13, 2007
Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof
SEMITOOL INC4 citations61
US7252714B2Aug 7, 2007
Apparatus and method for thermally controlled processing of microelectronic workpieces
SEMITOOL INC0 citations40