Inventor
HU ZHONGMIN
US3 patents
Patents
3 patentsUS7300562B2Nov 27, 2007
Platinum alloy using electrochemical deposition
SEMITOOL INC9 citations71
US7150820B2Dec 19, 2006
Thiourea- and cyanide-free bath and process for electrolytic etching of gold
SEMITOOL INC2 citations55
US7252714B2Aug 7, 2007
Apparatus and method for thermally controlled processing of microelectronic workpieces
SEMITOOL INC0 citations40