Inventor

WILSON GREGORY J

US96 patents

⚠️ This page may combine multiple inventors who share the name “WILSON GREGORY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WILSON GREGORY J

SEMITOOL INC

Method for electrochemically depositing metal on a semiconductor workpiece

System for electrochemically processing a workpiece

Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology

Workpiece processor having processing chamber with improved processing fluid flow

Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces

Thermal wafer processor

Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Methods and apparatus for processing microelectronic workpieces using metrology

Method and apparatus for processing a microelectronic workpiece at an elevated temperature

Apparatus and method for processing a microelectronic workpiece using metrology

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces

Apparatus and methods for electrochemical processing of microfeature wafers

Workpiece processor having processing chamber with improved processing fluid flow

Apparatus and methods for electrochemical processing of microelectronic workpieces

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Apparatus and method for processing a microelectronic workpiece using metrology

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Integrated microfeature workpiece processing tools with registration systems for paddle reactors

Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods

Thermal processor and components thereof

System for electrochemically processing a workpiece

Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature

Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces

APPLIED MATERIALS INC

Electroplating apparatus with electrolyte agitation

Apparatus for post exposure bake

Mechanically-driven oscillating flow agitation

Apparatus for post exposure bake

Mechanically-driven oscillating flow agitation

Electroplating apparatus with electrolyte agitation

Electroplating contact ring with radially offset contact fingers

Inert anode electroplating processor and replenisher with anionic membranes

Electroplating processor with current thief electrode

Electroplating apparatus with notch adapted contact ring seal and thief electrode

Electrochemical processor

Parameter adjustment model for semiconductor processing chambers

Vertically adjustable plasma source

Anneal module for semiconductor wafers

WILSON GREGORY J

Electrochemical processor

Flow battery systems

HSC RES DEV CORP

Process for preparing biological mammalian implants

DENG RONG

Method for embossing an absorbent article

WAAS STEVE J

Method for embossing an absorbent article using a segmented anvil

MCHUGH PAUL R

Electrochemical processor

HARRIS RANDY A

Electroplating processor with geometric electrolyte flow path