Inventor

MCHUGH PAUL R

US71 patents

⚠️ This page may combine multiple inventors who share the name “MCHUGH PAUL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MCHUGH PAUL R

SEMITOOL INC

Method for electrochemically depositing metal on a semiconductor workpiece

System for electrochemically processing a workpiece

Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology

Temperature control system for a thermal reactor

Workpiece processor having processing chamber with improved processing fluid flow

Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature

Temperature control system for a thermal reactor

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces

Thermal wafer processor

Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Methods and apparatus for processing microelectronic workpieces using metrology

Method and apparatus for processing a microelectronic workpiece at an elevated temperature

Apparatus and method for processing a microelectronic workpiece using metrology

Temperature control system for a thermal reactor

Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces

Apparatus and methods for electrochemical processing of microfeature wafers

Workpiece processor having processing chamber with improved processing fluid flow

Apparatus and methods for electrochemical processing of microelectronic workpieces

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Apparatus and method for processing a microelectronic workpiece using metrology

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Integrated microfeature workpiece processing tools with registration systems for paddle reactors

Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods

Thermal processor and components thereof

System for electrochemically processing a workpiece

Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature

Apparatus and methods for electrochemical processing of microelectronic workpieces

APPLIED MATERIALS INC

Electroplating apparatus with electrolyte agitation

Mechanically-driven oscillating flow agitation

Mechanically-driven oscillating flow agitation

Electroplating apparatus with electrolyte agitation

Inert anode electroplating processor and replenisher with anionic membranes

Electroplating processor with current thief electrode

Electroplating apparatus with notch adapted contact ring seal and thief electrode

Electrochemical processor

Parameter adjustment model for semiconductor processing chambers

Mechanically-driven oscillating flow agitation

Inert anode electroplating processor and replenisher

MCHUGH PAUL R

Electrochemical processor

Electroplating systems and methods for high sheet resistance substrates

Apparatus and methods for electrochemical processing of microfeature wafers

WILSON GREGORY J

Electrochemical processor

Electro processor with shielded contact ring

BROOKS AUTOMATION INC

Temperature control system for a thermal reactor

HARRIS RANDY A

Electroplating processor with geometric electrolyte flow path

KIM BIOH

Method of forming metal and metal alloy features