Inventor

TAYLOR II CHARLES A

US6 patents

⚠️ This page may combine multiple inventors who share the name “TAYLOR II CHARLES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPACE ASSOCIATES INC K

3 patents

US7837383B2Nov 23, 2010

Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing

SPACE ASSOCIATES INC K10 citations81

US7391523B1Jun 24, 2008

Curvature/tilt metrology tool with closed loop feedback control

SPACE ASSOCIATES INC K17 citations80

US9030652B2May 12, 2015

Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetry

SPACE ASSOCIATES INC K0 citations35

BARLETT DARRYL

2 patents

US8786841B2Jul 22, 2014

Thin film temperature measurement using optical absorption edge wavelength

BARLETT DARRYL6 citations67

US8282273B2Oct 9, 2012

Blackbody fitting for temperature determination

BARLETT DARRYL0 citations36

TAYLOR II CHARLES A

1 patent

US9239265B2Jan 19, 2016

Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing

TAYLOR II CHARLES A5 citations66