P

Inventor

HUET PATRICK Y

US6 patents
⚠️ This page may combine multiple inventors who share the name “HUET PATRICK Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US6718526B1Apr 6, 2004

Spatial signature analysis

KLA TENCOR CORP100 citations94
US7394534B1Jul 1, 2008

Process excursion detection

KLA TENCOR CORP15 citations91
US7646476B2Jan 12, 2010

Process excursion detection

KLA TENCOR CORP2 citations61

KLA TENCOR TECH CORP

1 patent
US7006886B1Feb 28, 2006

Detection of spatially repeating signatures

KLA TENCOR TECH CORP23 citations92

PARAMASIVAM SARAVANAN

1 patent
US8165837B1Apr 24, 2012

Multi-scale classification of defects

PARAMASIVAM SARAVANAN10 citations77

HUET PATRICK Y

1 patent
US8289510B2Oct 16, 2012

Process excursion detection

HUET PATRICK Y0 citations44