Inventor

PLIHAL MARTIN

US42 patents

⚠️ This page may combine multiple inventors who share the name “PLIHAL MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLIHAL MARTIN

KLA TENCOR CORP

Spatial signature analysis

Process excursion detection

Composite defect classifier

And noise based care areas

Optimizing training sets used for setting up inspection-related algorithms

Identifying nuisances and defects of interest in defects detected on a wafer

Creating defect classifiers and nuisance filters

Wafer defect discovery

Wafer inspection recipe setup

Adaptive automatic defect classification

Defect location accuracy using shape based grouping guided defect centering

Unbiased wafer defect samples

Creating and tuning a classifier to capture more defects of interest during inspection

System, method for training and applying defect classifiers in wafers having deeply stacked layers

Process excursion detection

Care areas for improved electron beam defect detection

Nuisance mining for novel defect discovery

System and method for difference filter and aperture selection using shallow deep learning

System, method and computer program product for correcting a difference image generated from a comparison of target and reference dies

System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components

Adaptive sampling for process window determination

Adaptive nuisance filter

Diagnostic methods for the classifiers and the defects captured by optical tools

System and method for production line monitoring

Mode selection for inspection

Production sample shaping that preserves re-normalizability

Dynamic binning for diversification and defect discovery

KLA CORP

Methods and systems for inspection of semiconductor structures with automatically generated defect features

Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection

System and method for determining defects using physics-based image perturbations

Method for process monitoring with optical inspections

Deep learning image denoising for semiconductor-based applications

Defect candidate generation for inspection

Process window qualification modulation layouts

KLA TENCOR TECH CORP

Wafer inspection systems and methods for analyzing inspection data

Methods and systems for generating an inspection process for an inspection system

Detection of spatially repeating signatures

Wafer inspection systems and methods for analyzing inspection data

PARK ALLEN

Scanner performance comparison and matching using design and defect data

PARAMASIVAM SARAVANAN

Multi-scale classification of defects

HUET PATRICK

Monitoring of time-varying defect classification performance

HUET PATRICK Y

Process excursion detection