Inventor

TEH CHO H

US4 patents

⚠️ This page may combine multiple inventors who share the name “TEH CHO H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US7394534B1Jul 1, 2008

Process excursion detection

KLA TENCOR CORP15 citations91

US7646476B2Jan 12, 2010

Process excursion detection

KLA TENCOR CORP2 citations61

CHEN CHIEN-HUEI

1 patent

US8502146B2Aug 6, 2013

Methods and apparatus for classification of defects using surface height attributes

CHEN CHIEN-HUEI13 citations79

HUET PATRICK Y

1 patent

US8289510B2Oct 16, 2012

Process excursion detection

HUET PATRICK Y0 citations44