Inventor
SOUSA WESTON L
US7 patents
⚠️ This page may combine multiple inventors who share the name “SOUSA WESTON L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS10451563B2Oct 22, 2019
Inspection of photomasks by comparing two photomasks
KLA TENCOR CORP11 citations82
US9863761B2Jan 9, 2018
Critical dimension uniformity monitoring for extreme ultraviolet reticles
KLA TENCOR CORP5 citations69
US9110039B2Aug 18, 2015
Auto-focus system and methods for die-to-die inspection
KLA TENCOR CORP3 citations54
US9778207B2Oct 3, 2017
Integrated multi-pass inspection
KLA TENCOR CORP1 citations51
US10288415B2May 14, 2019
Critical dimension uniformity monitoring for extreme ultra-violet reticles
KLA TENCOR CORP0 citations48