Inventor
HASHIZUME AKIO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “HASHIZUME AKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
11 patentsUS7422641B2Sep 9, 2008
Substrate cleaning apparatus and substrate cleaning method
DAINIPPON SCREEN MFG27 citations92
US7418970B2Sep 2, 2008
Substrate processing apparatus for drying substrate
DAINIPPON SCREEN MFG26 citations92
US9899240B2Feb 20, 2018
Substrate treatment apparatus
DAINIPPON SCREEN MFG5 citations72
US9364873B2Jun 14, 2016
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG3 citations72
US8883026B2Nov 11, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG5 citations72
US7959820B2Jun 14, 2011
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG4 citations62
US7314529B2Jan 1, 2008
Substrate cleaning apparatus and substrate cleaning method
DAINIPPON SCREEN MFG3 citations62
US8877653B2Nov 4, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51
US8821741B2Sep 2, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG0 citations51
US7838206B2Nov 23, 2010
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51
US7682456B2Mar 23, 2010
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG0 citations51
SCREEN HOLDINGS CO LTD
6 patentsUS10497581B2Dec 3, 2019
Substrate processing device
SCREEN HOLDINGS CO LTD2 citations73
US10903091B2Jan 26, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10835932B2Nov 17, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US11670529B2Jun 6, 2023
Substrate processing device and component inspection method for substrate processing device
SCREEN HOLDINGS CO LTD0 citations51
US10665479B2May 26, 2020
Substrate treatment device and substrate treatment method
SCREEN HOLDINGS CO LTD0 citations41
US10821483B2Nov 3, 2020
Substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations38