Inventor
WU TZU-YANG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “WU TZU-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
7 patentsUS7494830B2Feb 24, 2009
Method and device for wafer backside alignment overlay accuracy
TAIWAN SEMICONDUCTOR MFG23 citations88
US7450296B2Nov 11, 2008
Method and system for patterning alignment marks on a transparent substrate
TAIWAN SEMICONDUCTOR MFG13 citations83
US7294279B2Nov 13, 2007
Method for releasing a micromechanical structure
TAIWAN SEMICONDUCTOR MFG2 citations61
US7205176B2Apr 17, 2007
Surface MEMS mirrors with oxide spacers
TAIWAN SEMICONDUCTOR MFG5 citations60
US7611960B2Nov 3, 2009
Method and system for wafer backside alignment
TAIWAN SEMICONDUCTOR MFG5 citations58
US7183171B2Feb 27, 2007
Pyramid-shaped capacitor structure
TAIWAN SEMICONDUCTOR MFG2 citations57
US7838386B2Nov 23, 2010
Method and system for patterning alignment marks on a transparent substrate
TAIWAN SEMICONDUCTOR MFG0 citations51