Inventor

EGAMI AKIHIRO

JP8 patents

⚠️ This page may combine multiple inventors who share the name “EGAMI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

2 patents

US7807553B2Oct 5, 2010

Substrate heating apparatus and semiconductor fabrication method

CANON ANELVA CORP7 citations71

US8007633B2Aug 30, 2011

Surface processing apparatus

CANON ANELVA CORP0 citations40

PANASONIC IP MAN CO LTD

2 patents

US12513756B2Dec 30, 2025

Communication apparatus and communication method

PANASONIC IP MAN CO LTD0 citations60

US12148297B2Nov 19, 2024

In-vehicle apparatus, roadside apparatus, and communication method

PANASONIC IP MAN CO LTD0 citations60

SHIBAGAKI MASAMI

1 patent

US8198182B2Jun 12, 2012

Annealing method for semiconductor device with silicon carbide substrate and semiconductor device

SHIBAGAKI MASAMI2 citations60

KUMAGAI AKIRA

1 patent

US8150243B2Apr 3, 2012

Heating process apparatus

KUMAGAI AKIRA3 citations60

CANON ANELVA ENGINEERING CORP

1 patent

US7897523B2Mar 1, 2011

Substrate heating apparatus, heating method, and semiconductor device manufacturing method

CANON ANELVA ENGINEERING CORP2 citations56

EGAMI AKIHIRO

1 patent

US9194038B2Nov 24, 2015

Thin film forming apparatus, thin film forming method, and shield component

EGAMI AKIHIRO0 citations33