Inventor

LOPATA EUGENE

US5 patents

⚠️ This page may combine multiple inventors who share the name “LOPATA EUGENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US7901783B2Mar 8, 2011

Low κ dielectric inorganic/organic hybrid films and method of making

APPLIED MATERIALS INC44 citations96

SILCON VALLEY GROUP THERMAL SY

1 patent

US6068884AMay 30, 2000

Method of making low κ dielectric inorganic/organic hybrid films

SILCON VALLEY GROUP THERMAL SY357 citations96

ASML US INC

1 patent

US6660391B1Dec 9, 2003

Low κ dielectric inorganic/organic hybrid films and method of making

ASML US INC67 citations95

AVIZA TECH INC

1 patent

US7153580B2Dec 26, 2006

Low κ dielectric inorganic/organic hybrid films and method of making

AVIZA TECH INC8 citations72

DU PONT

1 patent

US6855370B2Feb 15, 2005

Fluoropolymer interlayer dielectric by chemical vapor deposition

DU PONT1 citations45