Inventor

FUNAKURA MITSURU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “FUNAKURA MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US9960065B2May 1, 2018

Substrate processing apparatus for managing transfer state of substrate gas storage container based on supply flow rate

HITACHI INT ELECTRIC INC7 citations79

NOGAMI SHIGEKI

1 patent

US8806370B2Aug 12, 2014

Substrate processing apparatus

NOGAMI SHIGEKI1 citations31