Inventor
ARATAKE HIDEMASA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ARATAKE HIDEMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11869780B2Jan 9, 2024
Substrate liquid processing apparatus
TOKYO ELECTRON LTD2 citations71
US12087599B2Sep 10, 2024
Substrate processing apparatus and apparatus cleaning method
TOKYO ELECTRON LTD0 citations50
US11745213B2Sep 5, 2023
Substrate processing apparatus and apparatus cleaning method
TOKYO ELECTRON LTD0 citations50
US11615971B2Mar 28, 2023
Substrate processing apparatus and processing liquid concentration method
TOKYO ELECTRON LTD0 citations48