Inventor
LARSON DEAN JAY
US5 patents
⚠️ This page may combine multiple inventors who share the name “LARSON DEAN JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS6481723B1Nov 19, 2002
Lift pin impact management
LAM RES CORP42 citations90
US6263542B1Jul 24, 2001
Tolerance resistant and vacuum compliant door hinge with open-assist feature
LAM RES CORP24 citations89
US6364762B1Apr 2, 2002
Wafer atmospheric transport module having a controlled mini-environment
LAM RES CORP43 citations87
US8701268B2Apr 22, 2014
Composite showerhead electrode assembly for a plasma processing apparatus
LAM RES CORP10 citations82