Inventor

STEVENSON TOM

US12 patents

⚠️ This page may combine multiple inventors who share the name “STEVENSON TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

7 patents

US9123651B2Sep 1, 2015

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

LAM RES CORP6 citations82

US8701268B2Apr 22, 2014

Composite showerhead electrode assembly for a plasma processing apparatus

LAM RES CORP10 citations82

US9873940B2Jan 23, 2018

Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus

LAM RES CORP16 citations81

US9899228B2Feb 20, 2018

Showerhead electrode assemblies for plasma processing apparatuses

LAM RES CORP2 citations72

US9546432B2Jan 17, 2017

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

LAM RES CORP3 citations71

US8975817B2Mar 10, 2015

Pressure controlled heat pipe temperature control plate

LAM RES CORP2 citations62

US9028646B2May 12, 2015

Film adhesive for semiconductor vacuum processing apparatus

LAM RES CORP0 citations51

STEVENSON TOM

2 patents

US8679288B2Mar 25, 2014

Showerhead electrode assemblies for plasma processing apparatuses

STEVENSON TOM6 citations81

US8529729B2Sep 10, 2013

Plasma processing chamber component having adaptive thermal conductor

STEVENSON TOM6 citations79

LARSON DEAN J

1 patent

US8449786B2May 28, 2013

Film adhesive for semiconductor vacuum processing apparatus

LARSON DEAN J15 citations83

LARSON DEAN JAY

1 patent

US8418649B2Apr 16, 2013

Composite showerhead electrode assembly for a plasma processing apparatus

LARSON DEAN JAY7 citations78

KIMBALL CHRIS

1 patent

US8906164B2Dec 9, 2014

Methods for stabilizing contact surfaces of electrostatic chucks

KIMBALL CHRIS0 citations29