Inventor

OKUNO MITSURU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “OKUNO MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RENESAS ELECTRONICS CORP

2 patents

US8367309B2Feb 5, 2013

Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask

RENESAS ELECTRONICS CORP0 citations48

US7935462B2May 3, 2011

Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask

RENESAS ELECTRONICS CORP0 citations48

RENESAS TECH CORP

1 patent

US7682760B2Mar 23, 2010

Pattern formation method using Levenson-type mask and method of manufacturing Levenson-type mask

RENESAS TECH CORP1 citations58

OKUNO MITSURU

1 patent

US8071264B2Dec 6, 2011

Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask

OKUNO MITSURU0 citations42

MINAMIDE AYUMI

1 patent

US8426087B2Apr 23, 2013

Photomask, manufacturing apparatus and method of semiconductor device using the same, and photomask feature layout method

MINAMIDE AYUMI0 citations35