Inventor

GAGE CHRISTOPHER

US4 patents

⚠️ This page may combine multiple inventors who share the name “GAGE CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GAGE CHRISTOPHER

2 patents

US8288288B1Oct 16, 2012

Transferring heat in loadlocks

GAGE CHRISTOPHER32 citations89

US8454294B2Jun 4, 2013

Minimum contact area wafer clamping with gas flow for rapid wafer cooling

GAGE CHRISTOPHER12 citations81

NOVELLUS SYSTEMS INC

1 patent

US8033771B1Oct 11, 2011

Minimum contact area wafer clamping with gas flow for rapid wafer cooling

NOVELLUS SYSTEMS INC501 citations97

HENRI JON

1 patent

US8100081B1Jan 24, 2012

Edge removal of films using externally generated plasma species

HENRI JON48 citations89