Inventor
POMEROY CHARLES E
US5 patents
⚠️ This page may combine multiple inventors who share the name “POMEROY CHARLES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS8033771B1Oct 11, 2011
Minimum contact area wafer clamping with gas flow for rapid wafer cooling
NOVELLUS SYSTEMS INC501 citations97
US5425803AJun 20, 1995
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC58 citations94
US5772736AJun 30, 1998
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC32 citations90
US5645625AJul 8, 1997
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC24 citations90