Inventor

HARTUNG ROBERT MICHAEL

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HARTUNG ROBERT MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PIECHULLA ALEXANDER

1 patent

US8460468B2Jun 11, 2013

Device for doping, deposition or oxidation of semiconductor material at low pressure

PIECHULLA ALEXANDER7 citations66

CT THERM CLEAN SOLUTIONS GMBH

1 patent

US7618595B2Nov 17, 2009

Assembly for purifying toxic gases from production processes

CT THERM CLEAN SOLUTIONS GMBH3 citations55

CENTROTHERM PHOTOVOLTAICS AG

1 patent

US8048208B2Nov 1, 2011

Method and apparatus for depositing chalcogens

CENTROTHERM PHOTOVOLTAICS AG0 citations30