Inventor

ZHOU WENZHAN

SG4 patents

⚠️ This page may combine multiple inventors who share the name “ZHOU WENZHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHOU WENZHAN

2 patents

US8896810B2Nov 25, 2014

Liquid immersion scanning exposure system using an immersion liquid confined within a lens hood

ZHOU WENZHAN0 citations44

US8572524B2Oct 29, 2013

Statistical optical proximity correction

ZHOU WENZHAN1 citations44

GLOBALFOUNDRIES SG PTE LTD

1 patent

US8741511B1Jun 3, 2014

Determination of lithography tool process condition

GLOBALFOUNDRIES SG PTE LTD4 citations67

SHANGHAI HUALI INTEGRATED CIRCUIT CORP

1 patent

US12588442B2Mar 24, 2026

Method for fabricating multiple work function layers

SHANGHAI HUALI INTEGRATED CIRCUIT CORP0 citations42