Inventor
SCHULBERG MICHELLE
US2 patents
Patents
2 patentsUS7589028B1Sep 15, 2009
Hydroxyl bond removal and film densification method for oxide films using microwave post treatment
NOVELLUS SYSTEMS INC424 citations97
US6951765B1Oct 4, 2005
Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor
NOVELLUS SYSTEMS INC28 citations91