P
PatentIndex
Search
Landscape
Sign in
Inventor
MATTERN VOLKER
DE
2 patents
Patents
2 patents
US5296091A
Mar 22, 1994
Method of etching substrates having a low thermal conductivity
IBM
17 citations
80
US5304278A
Apr 19, 1994
Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity
IBM
8 citations
71