Inventor
PETERMANN HEINZ-DIETER
DE2 patents
Patents
2 patentsUS6506306B1Jan 14, 2003
Method and an apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
INFINEON TECHNOLOGIES AG13 citations81
US6436281B2Aug 20, 2002
Apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
INFINEON TECHNOLOGIES AG11 citations70