P

Inventor

HUI KEUNG

TW11 patents
⚠️ This page may combine multiple inventors who share the name “HUI KEUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUI KEUNG

3 patents
US8309444B2Nov 13, 2012

System and method of dosage profile control

HUI KEUNG8 citations82
US9102033B2Aug 11, 2015

Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process

HUI KEUNG11 citations80
US8294124B2Oct 23, 2012

Scanning method and system using 2-D ion implanter

HUI KEUNG0 citations39

TAIWAN SEMICONDUCTOR MFG

3 patents
US9158301B2Oct 13, 2015

Semiconductor processing dispatch control

TAIWAN SEMICONDUCTOR MFG4 citations72
US8925479B2Jan 6, 2015

System and method of dosage profile control

TAIWAN SEMICONDUCTOR MFG0 citations51
US9323244B2Apr 26, 2016

Semiconductor fabrication component retuning

TAIWAN SEMICONDUCTOR MFG0 citations36

WU SUNNY

2 patents
US8295965B2Oct 23, 2012

Semiconductor processing dispatch control

WU SUNNY15 citations91
US8781614B2Jul 15, 2014

Semiconductor processing dispatch control

WU SUNNY2 citations61

LEE SHEN-NAN

2 patents
US9132523B2Sep 15, 2015

Chemical mechanical polish process control for improvement in within-wafer thickness uniformity

LEE SHEN-NAN5 citations69
US8129279B2Mar 6, 2012

Chemical mechanical polish process control for improvement in within-wafer thickness uniformity

LEE SHEN-NAN4 citations59

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent
US10096482B2Oct 9, 2018

Apparatus and method for chemical mechanical polishing process control

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71