Inventor

SASUGA YUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SASUGA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MASAKI NOBUYUKI

2 patents

US8129663B2Mar 6, 2012

Vacuum heating apparatus

MASAKI NOBUYUKI5 citations58

US8426323B2Apr 23, 2013

Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method

MASAKI NOBUYUKI1 citations48

DOI HIROSHI

1 patent

US9147742B2Sep 29, 2015

Heat treatment apparatus and semiconductor device manufacturing method

DOI HIROSHI1 citations48