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Inventor
EMGE DENNIS G
US
3 patents
⚠️ This page may combine multiple inventors who share the name “EMGE DENNIS G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US8995746B2
Mar 31, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP
7 citations
82
US9208553B2
Dec 8, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP
1 citations
50
KLA INSTR CORP
1 patent
US5578821A
Nov 26, 1996
Electron beam inspection system and method
KLA INSTR CORP
421 citations
95