Inventor
SULLIVAN JAMIE M
US12 patents
⚠️ This page may combine multiple inventors who share the name “SULLIVAN JAMIE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS8995746B2Mar 31, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP7 citations82
US9891175B2Feb 13, 2018
System and method for oblique incidence scanning with 2D array of spots
KLA TENCOR CORP2 citations71
US9645093B2May 9, 2017
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP3 citations69
US9546962B2Jan 17, 2017
Multi-spot scanning collection optics
KLA TENCOR CORP4 citations69
US9176069B2Nov 3, 2015
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP5 citations69
US9208553B2Dec 8, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP1 citations50
US9970883B2May 15, 2018
Multi-spot scanning collection optics
KLA TENCOR CORP1 citations48
US9864173B2Jan 9, 2018
Systems and methods for run-time alignment of a spot scanning wafer inspection system
KLA TENCOR CORP0 citations40
US9389166B2Jul 12, 2016
Enhanced high-speed logarithmic photo-detector for spot scanning system
KLA TENCOR CORP0 citations34
KLA TENCOR TECH CORP
3 patentsUS6833913B1Dec 21, 2004
Apparatus and methods for optically inspecting a sample for anomalies
KLA TENCOR TECH CORP44 citations89
US7012683B2Mar 14, 2006
Apparatus and methods for optically inspecting a sample for anomalies
KLA TENCOR TECH CORP13 citations80
US6686994B2Feb 3, 2004
UV compatible programmable spatial filter
KLA TENCOR TECH CORP8 citations70