Inventor
CAI WENJIAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “CAI WENJIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9395340B2Jul 19, 2016
Interleaved acousto-optical device scanning for suppression of optical crosstalk
KLA TENCOR CORP8 citations82
US8995746B2Mar 31, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP7 citations82
US9645093B2May 9, 2017
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP3 citations69
US9546962B2Jan 17, 2017
Multi-spot scanning collection optics
KLA TENCOR CORP4 citations69
US9176069B2Nov 3, 2015
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP5 citations69
US10060884B2Aug 28, 2018
Interleaved acousto-optical device scanning for suppression of optical crosstalk
KLA TENCOR CORP0 citations50
US9208553B2Dec 8, 2015
Image synchronization of scanning wafer inspection system
KLA TENCOR CORP1 citations50
US9970883B2May 15, 2018
Multi-spot scanning collection optics
KLA TENCOR CORP1 citations48
US9864173B2Jan 9, 2018
Systems and methods for run-time alignment of a spot scanning wafer inspection system
KLA TENCOR CORP0 citations40