Inventor

ANTSIFEROV PAVEL STANISLAVOVICH

RU6 patents

⚠️ This page may combine multiple inventors who share the name “ANTSIFEROV PAVEL STANISLAVOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US8921814B2Dec 30, 2014

Photon source, metrology apparatus, lithographic system and device manufacturing method

ASML NETHERLANDS BV28 citations90

US9357626B2May 31, 2016

Photon source, metrology apparatus, lithographic system and device manufacturing method

ASML NETHERLANDS BV7 citations82

US7872244B2Jan 18, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations49

ISTEQ B V

1 patent

US9476841B1Oct 25, 2016

High-brightness LPP EUV light source

ISTEQ B V22 citations88

RND IS AN LTD

1 patent

US9368337B2Jun 14, 2016

Light source with laser pumping and method for generating radiation

RND IS AN LTD2 citations54

ANTSIFEROV PAVEL STANISLAVOVICH

1 patent

US9357627B2May 31, 2016

Light source with laser pumping and method for generating radiation

ANTSIFEROV PAVEL STANISLAVOVICH2 citations54