Inventor
KOSHELEV KONSTANTIN NIKOLAEVICH
RU16 patents
⚠️ This page may combine multiple inventors who share the name “KOSHELEV KONSTANTIN NIKOLAEVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ISTEQ B V
6 patentsUS9476841B1Oct 25, 2016
High-brightness LPP EUV light source
ISTEQ B V22 citations88
US10588210B1Mar 10, 2020
High brightness short-wavelength radiation source (variants)
ISTEQ B V13 citations82
US10638588B2Apr 28, 2020
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris
ISTEQ B V7 citations81
US10887973B2Jan 5, 2021
High brightness laser-produced plasma light source
ISTEQ B V7 citations80
US11252810B2Feb 15, 2022
Short-wavelength radiation source with multisectional collector module and method of collecting radiation
ISTEQ B V2 citations69
US12028958B2Jul 2, 2024
High-brightness laser produced plasma source and method of generation and collection radiation
ISTEQ B V0 citations48
ASML NETHERLANDS BV
4 patentsUS7518135B2Apr 14, 2009
Reducing fast ions in a plasma radiation source
ASML NETHERLANDS BV2 citations56
US7772570B2Aug 10, 2010
Assembly for blocking a beam of radiation and method of blocking a beam of radiation
ASML NETHERLANDS BV0 citations51
US7872244B2Jan 18, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7825390B2Nov 2, 2010
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations45