Inventor
HAGIO YOSHINORI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HAGIO YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS9244365B2Jan 26, 2016
Method for measuring pattern misalignment
TOSHIBA KK4 citations71
US9146458B2Sep 29, 2015
EUV mask
TOSHIBA KK0 citations50
US9502357B2Nov 22, 2016
Alignment mark formation method and semiconductor device
TOSHIBA KK0 citations48
US9136224B2Sep 15, 2015
Alignment mark, photomask, and method for forming alignment mark
TOSHIBA KK0 citations48