Inventor

HIDAKA ATSUSHI

JP25 patents

⚠️ This page may combine multiple inventors who share the name “HIDAKA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HIDAKA ATSUSHI

FUJIKIN KK

Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith

Flow control device equipped with flow monitor

Multi-hole orifice plate for flow control, and flow controller using the same

Flow control system with build-down system flow monitoring

Raw material gas supply apparatus for semiconductor manufacturing equipment

Diaphragm type pressure sensor arrangement having corrosion resistance and yield strength

Vaporized feed device

Liquid level indicator and liquid raw material vaporization feeder

Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container

Controller and vaporization supply device

Casing for fluid controller and fluid controller provided with same

Pressure sensor that mitigates zero drop phenomena

Cover component for pressure sensor, and pressure sensor device comprising same

Abnormality detection method for flow rate control device, and flow rate monitoring method

Liquid level meter, vaporizer equipped with the same, and liquid level detection method

Flow meter and flow control device provided therewith

Raw material vaporization and supply apparatus

Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method

Diaphragm valve

Fluid control device

Vaporization supply apparatus

HIDAKA ATSUSHI

Piezoelectrically driven valve and piezoelectrically driven flow rate control device

Pressure type flow rate control device

NAGATA ATSUSHI

Gas supply apparatus equipped with vaporizer

OHMI TADAHIRO

Vaporizer