Inventor
AHLAWAT RAHUL
US12 patents
Patents
12 patentsUS9261794B1Feb 16, 2016
Compensation for a disturbance in an optical source
Cymer LLC9 citations81
US9819136B2Nov 14, 2017
Gas mixture control in a gas discharge light source
Cymer LLC5 citations71
US10816905B2Oct 27, 2020
Wavelength stabilization for an optical source
Cymer LLC1 citations60
US11754541B2Sep 12, 2023
Fluorine detection in a gas discharge light source
Cymer LLC0 citations59
US12529962B2Jan 20, 2026
Method of compensating wavelength error induced by repetition rate deviation
Cymer LLC0 citations58
US11803126B2Oct 31, 2023
Method of compensating wavelength error induced by repetition rate deviation
Cymer LLC1 citations58
US12438334B2Oct 7, 2025
Apparatus for and method of modulating a light source wavelength
Cymer LLC0 citations53
US10096967B2Oct 9, 2018
Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source
Cymer LLC0 citations51
US9785050B2Oct 10, 2017
Pulsed light beam spectral feature control
Cymer LLC1 citations51
US9772556B2Sep 26, 2017
Pulsed light beam spectral feature control
Cymer LLC0 citations51
US10090629B2Oct 2, 2018
Gas mixture control in a gas discharge light source
Cymer LLC0 citations50
US9634460B2Apr 25, 2017
Compensation for a disturbance in an optical source
Cymer LLC0 citations49