Inventor
RAMACHANDRAN BALASUBRAMANIAN
US43 patents
⚠️ This page may combine multiple inventors who share the name “RAMACHANDRAN BALASUBRAMANIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS7112763B2Sep 26, 2006
Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers
APPLIED MATERIALS INC69 citations94
US6888104B1May 3, 2005
Thermally matched support ring for substrate processing chamber
APPLIED MATERIALS INC41 citations92
US7398693B2Jul 15, 2008
Adaptive control method for rapid thermal processing of a substrate
APPLIED MATERIALS INC19 citations91
US7127367B2Oct 24, 2006
Tailored temperature uniformity
APPLIED MATERIALS INC36 citations90
US6897131B2May 24, 2005
Advances in spike anneal processes for ultra shallow junctions
APPLIED MATERIALS INC45 citations90
US9914999B2Mar 13, 2018
Oxidized showerhead and process kit parts and methods of using same
APPLIED MATERIALS INC10 citations84
US10930543B2Feb 23, 2021
Thermal processing susceptor
APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018
Thermal processing susceptor
APPLIED MATERIALS INC7 citations83
US7951728B2May 31, 2011
Method of improving oxide growth rate of selective oxidation processes
APPLIED MATERIALS INC7 citations83
US9842753B2Dec 12, 2017
Absorbing lamphead face
APPLIED MATERIALS INC2 citations73
US9580835B2Feb 28, 2017
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC2 citations73
US9532401B2Dec 27, 2016
Susceptor support shaft with uniformity tuning lenses for EPI process
APPLIED MATERIALS INC5 citations73
US7778533B2Aug 17, 2010
Semiconductor thermal process control
APPLIED MATERIALS INC5 citations71
US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC2 citations69
US12400904B2Aug 26, 2025
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US10077508B2Sep 18, 2018
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9230837B2Jan 5, 2016
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9117661B2Aug 25, 2015
Method of improving oxide growth rate of selective oxidation processes
APPLIED MATERIALS INC3 citations62
US7667162B2Feb 23, 2010
Semiconductor thermal process control utilizing position oriented temperature generated thermal mask
APPLIED MATERIALS INC2 citations60
US10179354B2Jan 15, 2019
Optical endpoint detection system
APPLIED MATERIALS INC0 citations52
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48
US8821643B2Sep 2, 2014
In-situ chamber cleaning for an RTP chamber
APPLIED MATERIALS INC1 citations45
SKYWORKS SOLUTIONS INC
5 patentsUS6674999B2Jan 6, 2004
Dynamically varying linearity system for an RF front-end of a communication device
SKYWORKS SOLUTIONS INC82 citations98
US7502625B2Mar 10, 2009
Integrated multi-band transceiver for use in mobile communication device
SKYWORKS SOLUTIONS INC13 citations84
US7515929B2Apr 7, 2009
Receiver for a multimode radio
SKYWORKS SOLUTIONS INC19 citations83
US7130596B2Oct 31, 2006
Dynamically varying linearity system for an RF front-end of a communication device
SKYWORKS SOLUTIONS INC8 citations74
US7415264B2Aug 19, 2008
Low noise filter for a wireless receiver
SKYWORKS SOLUTIONS INC3 citations62
RAMACHANDRAN BALASUBRAMANIAN
4 patentsUS9347132B2May 24, 2016
Optical endpoint detection system
RAMACHANDRAN BALASUBRAMANIAN10 citations83
US8513626B2Aug 20, 2013
Method and apparatus for reducing patterning effects on a substrate during radiation-based heating
RAMACHANDRAN BALASUBRAMANIAN7 citations83
US9127360B2Sep 8, 2015
Epitaxial chamber with cross flow
RAMACHANDRAN BALASUBRAMANIAN3 citations58
US8217574B2Jul 10, 2012
Lamp with internal fuse system
RAMACHANDRAN BALASUBRAMANIAN0 citations40
RANISH JOSEPH M
2 patentsQUALCOMM INC
2 patentsMICROSOFT TECHNOLOGY LICENSING LLC
2 patentsUS10922661B2Feb 16, 2021
Controlling a computing system to generate a pre-accept cache for calendar sharing
MICROSOFT TECHNOLOGY LICENSING LLC0 citations51
US11348072B2May 31, 2022
Techniques for sharing electronic calendars between mailboxes in an online application and collaboration service
MICROSOFT TECHNOLOGY LICENSING LLC0 citations43