P

Inventor

RAMACHANDRAN BALASUBRAMANIAN

US43 patents
⚠️ This page may combine multiple inventors who share the name “RAMACHANDRAN BALASUBRAMANIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

23 patents
US7112763B2Sep 26, 2006

Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers

APPLIED MATERIALS INC69 citations94
US6888104B1May 3, 2005

Thermally matched support ring for substrate processing chamber

APPLIED MATERIALS INC41 citations92
US7398693B2Jul 15, 2008

Adaptive control method for rapid thermal processing of a substrate

APPLIED MATERIALS INC19 citations91
US7127367B2Oct 24, 2006

Tailored temperature uniformity

APPLIED MATERIALS INC36 citations90
US6897131B2May 24, 2005

Advances in spike anneal processes for ultra shallow junctions

APPLIED MATERIALS INC45 citations90
US9914999B2Mar 13, 2018

Oxidized showerhead and process kit parts and methods of using same

APPLIED MATERIALS INC10 citations84
US10930543B2Feb 23, 2021

Thermal processing susceptor

APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018

Thermal processing susceptor

APPLIED MATERIALS INC7 citations83
US7951728B2May 31, 2011

Method of improving oxide growth rate of selective oxidation processes

APPLIED MATERIALS INC7 citations83
US9842753B2Dec 12, 2017

Absorbing lamphead face

APPLIED MATERIALS INC2 citations73
US9580835B2Feb 28, 2017

Multizone control of lamps in a conical lamphead using pyrometers

APPLIED MATERIALS INC2 citations73
US9532401B2Dec 27, 2016

Susceptor support shaft with uniformity tuning lenses for EPI process

APPLIED MATERIALS INC5 citations73
US7778533B2Aug 17, 2010

Semiconductor thermal process control

APPLIED MATERIALS INC5 citations71
US9832816B2Nov 28, 2017

Absorbing reflector for semiconductor processing chamber

APPLIED MATERIALS INC2 citations69
US12400904B2Aug 26, 2025

Thermal processing susceptor

APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023

Thermal processing susceptor

APPLIED MATERIALS INC0 citations62
US10077508B2Sep 18, 2018

Multizone control of lamps in a conical lamphead using pyrometers

APPLIED MATERIALS INC1 citations62
US9230837B2Jan 5, 2016

Multizone control of lamps in a conical lamphead using pyrometers

APPLIED MATERIALS INC1 citations62
US9117661B2Aug 25, 2015

Method of improving oxide growth rate of selective oxidation processes

APPLIED MATERIALS INC3 citations62
US7667162B2Feb 23, 2010

Semiconductor thermal process control utilizing position oriented temperature generated thermal mask

APPLIED MATERIALS INC2 citations60
US10179354B2Jan 15, 2019

Optical endpoint detection system

APPLIED MATERIALS INC0 citations52
US10306708B2May 28, 2019

Absorbing reflector for semiconductor processing chamber

APPLIED MATERIALS INC0 citations48
US8821643B2Sep 2, 2014

In-situ chamber cleaning for an RTP chamber

APPLIED MATERIALS INC1 citations45

SKYWORKS SOLUTIONS INC

5 patents

RAMACHANDRAN BALASUBRAMANIAN

4 patents

RANISH JOSEPH M

2 patents

QUALCOMM INC

2 patents

MICROSOFT TECHNOLOGY LICENSING LLC

2 patents

ADERHOLD WOLFGANG

1 patent

YOKOTA YOSHITAKA

1 patent

CATERPILLAR INC

1 patent

VENKATASUBRAMANIAN GURUGUHA

1 patent

COMCAST CABLE COMM LLC

1 patent