Inventor

ZHU ZUOMING

US24 patents

⚠️ This page may combine multiple inventors who share the name “ZHU ZUOMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHU ZUOMING

APPLIED MATERIALS INC

Thermal processing susceptor

Thermal processing susceptor

Multi zone spot heating in EPI

Multi zone spot heating in EPI

Wafer spot heating with beam width modulation

Multi zone spot heating in epi

Absorbing lamphead face

In-situ temperature mapping for epi chamber

Quartz upper and lower domes

Thermal processing susceptor

Thermal processing susceptor

EPI thickness tuning by pulse or profile spot heating

Methods for detection using optical emission spectroscopy

Chamber body feedthrough for in chamber resistive heating element

Method and system for foreline deposition diagnostics and control

Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system

Substrate processing monitoring

Multi-flow gas circuits, processing chambers, and related apparatus and methods for semiconductor manufacturing

Batch thermal process chamber

Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability

Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber

Methods of correlating zones of processing chambers, and related systems and methods

Reduced strain Si/SiGe heteroepitaxy stacks for 3D DRAM

RAMACHANDRAN BALASUBRAMANIAN

Epitaxial chamber with cross flow