Inventor

ANDREWS DANA L

US3 patents

Patents

3 patents

US5215619AJun 1, 1993

Magnetic field-enhanced plasma etch reactor

APPLIED MATERIALS INC194 citations98

US4842683AJun 27, 1989

Magnetic field-enhanced plasma etch reactor

APPLIED MATERIALS INC410 citations98

US5226632AJul 13, 1993

Slit valve apparatus and method

APPLIED MATERIALS INC80 citations94