Inventor
HAYASAKA SHOGO
JP2 patents
Patents
2 patentsUS12148614B2Nov 19, 2024
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations58
US12469713B2Nov 11, 2025
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations54