Inventor
TSU DAVID V
US4 patents
⚠️ This page may combine multiple inventors who share the name “TSU DAVID V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENERGY CONVERSION DEVICES INC
3 patentsUS5324553AJun 28, 1994
Method for the improved microwave deposition of thin films
ENERGY CONVERSION DEVICES INC88 citations95
US6723421B2Apr 20, 2004
Semiconductor with coordinatively irregular structures
ENERGY CONVERSION DEVICES INC29 citations91
US5567241AOct 22, 1996
Method and apparatus for the improved microwave deposition of thin films
ENERGY CONVERSION DEVICES INC28 citations91