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Inventor
STEIMER KONRAD CARL
DE
2 patents
Patents
2 patents
US11703770B2
Jul 18, 2023
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH
0 citations
44
US11526089B2
Dec 13, 2022
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH
0 citations
44