Inventor

SLONAKER STEVE

US2 patents

Patents

2 patents

US6664121B2Dec 16, 2003

Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool

NIKON PREC INC38 citations88

US6538753B2Mar 25, 2003

Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools

NIKON PREC INC6 citations70