Inventor
CHENG ARNOLD
US2 patents
Patents
2 patentsUS6028664AFeb 22, 2000
Method and system for establishing a common reference point on a semiconductor wafer inspected by two or more scanning mechanisms
INSPEX INC46 citations87
US6643006B1Nov 4, 2003
Method and system for reviewing a semiconductor wafer using at least one defect sampling condition
INSPEX INC18 citations80